Kevin Wu Phones & Addresses
-
Maitland, FL
-
Brooklyn, NY
Work
Company:
Kirch industries
Address:
13820 61St Rd, Flushing, NY 11367
Phones:
(718) 898-6616
Position:
Executive officer
Industries:
Durable Goods
Business Records
Name / Title
Company / Classification
Phones & Addresses
Executive Officer
Kirch Industries
Durable Goods
Durable Goods
13820 61St Rd, Flushing, NY 11367
Executive Officer
Kirch Industries
Durable Goods
Durable Goods
13820 61St Rd, Flushing, NY 11367
Publications
Us Patents
Method Of Making A Dielectric For An Integrated Circuit
View pageUS Patent:
59603020, Sep 28, 1999
Filed:
Dec 31, 1996
Appl. No.:
8/775790
Inventors:
Yi Ma - Orlando FL
Pradip Kumar Roy - Orlando FL
Kevin Yun-Kang Wu - Austin TX
Pradip Kumar Roy - Orlando FL
Kevin Yun-Kang Wu - Austin TX
Assignee:
Lucent Technologies, Inc. - Murray Hill NJ
International Classification:
H01L 213205
US Classification:
438585
Abstract:
A composite 3-layer gate dielectric is disclosed. The upper and lower layers have a concentration of nitrogen atoms, while the middle layer has very few nitrogen atoms. The presence of the nitrogen atoms in the top sublayers provides resistance to boron diffusion from the top conductive layer and plasma damage during polysilicon gate stack formation and the presence of nitrogen in the bottom sublayer near the silicon-dielectric interface improves wearout, endurance, resistance to current stress and electron traps.