Ken C Lee

20120019626, Jan 26, 2012

Jun 29, 2011

13/172686

Zhen Hou - Fremont CA, US
James Jianguo Xu - San Jose CA, US
Ken Kinsun Lee - Los Altos Hills CA, US
James Nelson Stainton - San Jose CA, US
Hung Phi Nguyen - Santa Clara CA, US
Rusmin Kudinar - Fremont CA, US
Ronny Soetarman - Fremont CA, US

Zeta Instruments, Inc. - San Jose CA

H04N 13/02
H04N 7/18

348 50, 348136, 348 79, 348E13074, 348E07085

A three-dimensional (3D) microscope for patterned substrate measurement can include an objective lens, a reflected illuminator, a transmitted illuminator, a focusing adjustment device, an optical sensor, and a processor. The focusing adjustment device can automatically adjust the objective lens focus at a plurality of Z steps. The optical sensor can be capable of acquiring images at each of these Z steps. The processor can control the reflected illuminator, the transmitted illuminator, the focusing adjustment device, and the optical sensor. The processor can be configured to capture first and second images at multiple Z steps, the first image with the pattern using the reflected illuminator and the second image without the pattern using one of the reflected illuminator and the transmitted illuminator.

20180047148, Feb 15, 2018

Oct 31, 2016

15/338838

- San Jose CA, US
Ronny Soetarman - Fremont CA, US
Ken Kinsun Lee - Los Altos Hills CA, US
Nitigya Kathuria - San Jose CA, US

G06T 7/00
G01N 21/88
G01N 21/95
G02B 21/36
G02B 21/24

A method of generating 3D information of a sample using an optical microscope includes: varying the distance between the sample and an objective lens of the optical microscope at pre-determined steps, capturing an image at each pre-determined step, determining a characteristic value of each pixel in each captured image, determining a first captured image that is focused on a first surface of the sample based on the characteristic value of each pixel in each captured image, and determining a measurement of an opening in the first surface of the sample based on the first captured image. The first surface of the sample and the second surface of the sample are within a field of view of each of the captured images. The first captured image includes a pattern overlay. In another example, the opening measurement is determined using a second captured image without a pattern overlay.