Inventors:
Prahalad K. Vasudev - Austin TX
Kah K. Low - Austin TX
Assignee:
Sematech, Inc. - Austin TX
Motorola Inc. - Schaumburg IL
International Classification:
G03F 900
Abstract:
A multi-layer PSM structure with multi-layer optical coating disposed between a quartz substrate and a surrounding medium, which typically is air. The multi-layer coating is comprised of a high index of refraction material overlying the quartz and a lower index of refraction material overlying the first. The multi-layer coating essentially functions as an anti-reflective coating to reduce scattering and reflection at the interface boundaries.