Jin Jwang Wu - Ossining NY William Albert Cavaliere - Verbank NY James Patrick Norum - Millwood NY Stefan Schmitz - Pleasant Valley NY
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
F25J 100
US Classification:
62617
Abstract:
A cryogenic aerosol separator/classifier for separating and selectively removing particles from a stream of aerosol. The aerosol stream is produced by a cryogenic aerosol generator comprising a reservoir containing a cryogenic gas-liquid mixture at a first pressure, a delivery line coupled to the reservoir, and a nozzle. The nozzle has at least one exit opening which allows the cryogenic gas-liquid mixture to expand from the first pressure to a lower pressure and, thus, to produce cryogenic aerosol. A separator is coupled to the nozzle, such that the light particles having high mobility are removed from the stream, thereby producing a stream of cryogenic flow with particles having a controlled size to clean a contaminated surface. The apparatus is enhanced by utilizing a magnetic field and/or specially designed flow fields to fully take advantage of the enhanced mobilities of light particles.
Jin Jwang Wu - Ossining NY Soichi Nadahara - Yokohama, JP Susan L. Cohen - Austin TX Russell Arndt - Wappingers Falls NY
Assignee:
Kabushiki Kaisha Toshiba - Kawasaki International Business Machines Corporation - Armonk NY
International Classification:
F26B 2106
US Classification:
34 78
Abstract:
A vapor drying system includes a tank for holding a drying liquid and a heater for boiling the drying liquid in the tank to produce a vapor. A manifold is arranged in the tank for bubbling gas into the drying liquid. A controller is configured to cause the manifold to bubble gas into the drying liquid at a time when substrates to be dried are first introduced into the tank in order to quench the boiling of the drying liquid and generate a saturated vapor at a rate sufficient to achieve condensation of the drying liquid over substantially the entire surface of each of the substrates to be dried. In this way, staining of the substrates is reduced and process yield is improved.