Inventors:
- Santa Clara CA, US
Chi-Feng LIU - Chubei City, TW
Yi Nung WU - Hsinchu City, TW
Hsiu YANG - Santa Clara CA, US
Yixing LIN - Saratoga CA, US
Boon Sen CHAN - Singapore, SG
Siamak SALIMIAN - Los Altos CA, US
International Classification:
C23C 16/44
H05B 1/02
C23C 16/455
Abstract:
Methods and apparatus for a baking chamber for processing a chamber component are provided herein. In some embodiments, a baking chamber includes: an enclosure defining a first chamber, wherein the first chamber comprises: a first chamber body having a first floor and first sidewalls that couple the first floor to a first lid of the first chamber body to define a first interior volume; a first support disposed in the first interior volume; a first gas line disposed in the first interior volume proximate the first lid; a first showerhead disposed between the first gas line and the first support; a first exhaust coupled to the first floor; and a first heater disposed in the first interior volume between the first support and the first floor; and wherein the enclosure includes a door configured to facilitate transferring the chamber component into and out of the enclosure.