Inventors:
Satbir Kahlon - Livermore CA, US
Frank Ma - Scotts Valley CA, US
Assignee:
Intermolecular, Inc. - San Jose CA
International Classification:
B08B 5/00
US Classification:
134 31, 134 21, 134 251, 134 254, 134 255, 134 26, 134 30, 134 32, 134 33, 134 34, 134 36, 134 37, 134 42, 134902, 216 58
Abstract:
A method and system for cleaning a substrate in a multi-module cleaning assembly is provided. The method begins by receiving the substrate into the cleaning module. A cleaning chemistry, at a temperature elevated from an ambient temperature, is applied onto a top surface of the substrate. Concurrent with application of the cleaning chemistry, vapors are exhausted from the cleaning chemistry through a port located below a bottom surface of the substrate with the vapor exhaustion providing a negative pressure relative to a pressure external to the cleaning module. The application of the cleaning chemistry is terminated, followed by termination of the exhausting of the vapors. The substrate is dried after the flowing of inert gas is terminated.