Inventors:
Ravindra V. Shenoy - Dublin CA, US
Kwan-Yu Lai - San Jose CA, US
Jon Bradley Lasiter - Stockton CA, US
Jonghae Kim - San Diego CA, US
Mario Francisco Velez - San Diego CA, US
Chi Shun Lo - San Diego CA, US
Donald William Kidwell - Los Gatos CA, US
Philip Jason Stephanou - Mountain View CA, US
Justin Phelps Black - Santa Clara CA, US
Evgeni Petrovich Gousev - Saratoga CA, US
Assignee:
QUALCOMM MEMS TECHNOLOGIES, INC. - San Diego CA
International Classification:
H05K 7/00
H01F 41/00
G06T 1/00
H01L 21/56
H05K 1/00
H05K 1/09
H01R 43/20
H01L 23/29
US Classification:
345501, 29825, 296021, 216 18, 257774, 438113, 174258, 361748, 361782, 174257, 361746, 257E23118, 257E21504
Abstract:
This disclosure provides systems, methods and apparatus for glass via bars that can be used in compact three-dimensional packages, including embedded wafer level packages. The glass via bars can provide high density electrical interconnections in a package. In some implementations, the glass via bars can include integrated passive components. Methods of fabricating glass via bars are provided. In some implementations, the methods can include patterning and etching photo-patternable glass substrates. Packaging methods employing glass via bars are also provided.