Inventors:
Kurt K. Christenson - Minnetonka MN, US
Steven L. Nelson - Minnetonka MN, US
James R. Oikari - New Brighton MN, US
Jeff F. Olson - Burnsville MN, US
Biao Wu - Milpitas CA, US
Assignee:
FSI International, Inc. - Chaska MN
International Classification:
B08B 3/02
US Classification:
134 2, 134 3, 134 19, 134 21, 134 26, 134 28, 134 30, 134 31, 134 32, 134 33, 134 34, 134 35, 134 36, 134 37, 134 41, 134 42, 134902
Abstract:
Described are methods of rinsing and processing devices such as semiconductor wafers wherein the device is rinsed with using a surface tension reducing agent; the method may include a subsequent drying step which preferably incorporates the use of a surface tension reducing agent during at least partial drying; and the method may be performed using automated rinsing equipment; also described are automated rinsing apparatuses useful with the method.