Inventors:
Bernard J Savord - Andover MA, 01810
William J Ossmann - Acton MA, 01720
Jie Chen - North Andover MA, 01845
Michael P Anthony - Andover MA, 01810
Turuvekere R Gururaja - Parkvale Drive Discovery Bay, HK
Stephen M Grenon - Hillsborough NC, 27278
International Classification:
H04R 1700
Abstract:
A micro-machined ultrasonic transducer (MUT) having aperture, elevation and apodization controlled by apparatus located on the same substrate as the transducer, or by bias voltage control applied to MUT elements, allows for an efficient and compact ultrasonic probe. The control apparatus may take the form of field effect transistors (FETs), micro-machined relays, or doped regions on the substrate, or any other apparatus that may be located on the same substrate as that of the transducer, or by bias voltage sources connected to the MUT elements.