Inventors:
Mark Thomas McCormack - Livermore CA
James Roman - Sunnyvale CA
Lei Zhang - San Jose CA
Solomon I. Beilin - San Carlos CA
International Classification:
C03C 2568
US Classification:
216 67, 216 40, 216 58, 438697, 438706, 438976, 156246, 156247, 156248, 1562722, 1562726, 1562733, 1562739, 29846, 29849, 427569, 427576, 427579
Abstract:
Improved methods and articles used to fabricate flexible circuit structures are disclosed. The methods include depositing a release layer or a dielectric film on a substrate, and then forming a conductive laminate on the release layer or the dielectric film. The conductive laminate may be easily separated by the substrate to eventually form a flexible circuit structure. Plasma may be used to treat a surface of the release layer or the dielectric film to produce a plasma-treated surface to lower the peel strength of any film or layer bound to the plasma-treated surface.