US Patent:
20080283579, Nov 20, 2008
Inventors:
Satish Gunturi - Albany NY, US
Raymond Zehringer - Muttenz, CH
Wolfgang Knapp - Lenzburg, CH
Assignee:
ABB Research Ltd - Zurich
International Classification:
B23K 31/02
Abstract:
A first electronic component, e.g., a semiconductor die and a second electronic component, e.g., a substrate, each with a main surface, are bonded to each other by applying at least one metal layer comprising an indium layer on each of the main surfaces. Then the semiconductor die and the substrate are aligned against each other with their main surfaces facing each other. The die and substrate with the metal layers in between form an arrangement, which is introduced into a compression means. Afterwards the arrangement is compressed in the compression means at a pressure in a range of 10 to 35 MPa, and heat in a range of 230 to 275 C. is applied to the arrangement, by which temperature and pressure the electronic components are bonded to each other. The compression process is performable in oxygeneous gas atmosphere inside the compression means.