Inventors:
Terrence J. Riley - Austin TX
Qingsu Wang - Austin TX
Glen W. Scheid - Gresham OR
Kent F. Knox - Austin TX
Assignee:
Advanced Micro Devices, Inc. - Austin TX
International Classification:
G01R 3126
US Classification:
702185, 700110, 700175, 324765
Abstract:
A method for identifying faulty wafers includes processing a set of wafers in a tool; collecting tool state information during the processing of the set of wafers; generating a tool state information baseline; comparing the tool state information for each wafer to the tool state information baseline to identify any wafers with outlying tool state information; and designating a particular wafer in the set as suspect in response to identifying outlying tool state information for the particular wafer. A processing line includes a tool adapted to process a set of wafers, and a process controller. The process controller is adapted to collect tool state information during the processing of the set of wafers, generate a tool state information baseline, compare the tool state information for each wafer to the baseline tool state information to identify any wafers with outlying tool state information, and designate a particular wafer in the set as suspect in response to identifying outlying tool state information for the particular wafer.