David Mueller - Evansville IN, US Edward Diekmann - Evansville IN, US
International Classification:
H01L021/00 H01L021/64 C23C016/00
US Classification:
118/718000, 029/025010
Abstract:
A conveyor system for parts coupled to a loadbar assembly is disclosed. The conveyor system includes a walking beam conveyor and a push bar conveyor. The loadbar assembly and walking beam conveyor are configured to allow transfer of parts coupled to loadbar assemblies along a path through upward and downward and forward and reverse movements of the walking beam conveyor. The push bar conveyor and the loadbar assembly are configured to urge parts coupled to the loadbar assemblies through the push bar conveyor by an incremental distance substantially equal to the length of a segment bar of the loadbar assembly.